Design and fabrication of diamond probe for atomic force microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 336-343

  Shibata, Takayuki ^a   Nakatsuji, Tae ^a   Unno, Kazuya ^a   Makino, Eiji ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BONDING; DIAMOND FILMS;

DIAMOND PROBES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033341979     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)