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Volumn 62, Issue 3, 1996, Pages 448-452

Electron beam assisted chemical etching of single crystal diamond chips (1st report) - Etching characteristics and fabrication of line and rectangular pattern

(2)  Taniguchi, Jun a   Miyamoto, Iwao a  

a NONE

Author keywords

Diamond tool; Electron beam assisted chemical etching; Oxygen gas; Scanning electron microscope

Indexed keywords

ELECTRON BEAMS; GAS ADSORPTION; MACHINE TOOLS; MODELS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SURFACES; SYNTHETIC DIAMONDS;

EID: 0030106617     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.62.448     Document Type: Article
Times cited : (1)

References (6)
  • 1
    • 5244257273 scopus 로고    scopus 로고
    • Japanese source
  • 3
    • 4243177086 scopus 로고
    • Ultra-precision Processing of Diamond with Oxygen Ion Beams, Adv. Intelligent Prod
    • S. Kiyohara and I. Miyamoto : Ultra-precision Processing of Diamond with Oxygen Ion Beams, Adv. Intelligent Prod., The Japan Soc. Prec. Eng., (1994) 576.
    • (1994) The Japan Soc. Prec. Eng. , pp. 576
    • Kiyohara, S.1    Miyamoto, I.2
  • 4
    • 0022897673 scopus 로고
    • Megavolt and Cryo Electron Microscopy of Diamond Knife Edges
    • H. Fernandez-Moran: Megavolt and Cryo Electron Microscopy of Diamond Knife Edges, Ultramicroscopy, 20, (1986) 317.
    • (1986) Ultramicroscopy , vol.20 , pp. 317
    • Fernandez-Moran, H.1
  • 6
    • 5244279118 scopus 로고    scopus 로고
    • Japanese source


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.