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Volumn 62, Issue 3, 1996, Pages 448-452
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Electron beam assisted chemical etching of single crystal diamond chips (1st report) - Etching characteristics and fabrication of line and rectangular pattern
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Author keywords
Diamond tool; Electron beam assisted chemical etching; Oxygen gas; Scanning electron microscope
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Indexed keywords
ELECTRON BEAMS;
GAS ADSORPTION;
MACHINE TOOLS;
MODELS;
SCANNING ELECTRON MICROSCOPY;
SINGLE CRYSTALS;
SURFACES;
SYNTHETIC DIAMONDS;
DIAMOND TOOLS;
ELECTRON BEAM ASSISTED CHEMICAL ETCHING;
LINE AND RECTANGULAR PATTERNS;
OXYGEN GAS;
ETCHING;
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EID: 0030106617
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.62.448 Document Type: Article |
Times cited : (1)
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References (6)
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