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Volumn 334, Issue 1-2, 1998, Pages 161-164

Fabrication of a micro-patterned diamond film by site-selective plasma chemical vapor deposition

Author keywords

Diamond; Micropattern; Plasma CVD; Platinum

Indexed keywords

FILM PREPARATION; GRAIN GROWTH; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLATINUM; SILICA; SURFACE PROPERTIES;

MICRO-PATTERNED FILMS;

DIAMOND FILMS;

EID: 0032483897 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01136-5 Document Type: Article

Times cited : (15)

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