Diamond microstructure replicas from silicon masters

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 34-39

  Bjorkman, H ^a   Rangsten, P ^a   Simu, U ^a   Karlsson, J ^a   Hollman, P ^a   Hjort, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; MICROELECTROMECHANICAL DEVICES; SYNTHESIS (CHEMICAL); SYNTHETIC DIAMONDS; THICK FILM DEVICES;

DIAMOND REPLICAS; MICROSTRUCTURED SILICON;

SEMICONDUCTING DIAMONDS;

EID: 0031707595     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)