Microfabrication of diamond probe for atomic force microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 1125-1133

  Shibata, Takayuki ^a   Nakatsuji, Tae ^a   Kitamoto, Yasutaka ^a   Unno, Kazuya ^a   Makino, Eiji ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; DIAMONDS; ETCHING; EVAPORATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NUCLEATION;

MICROFABRICATION;

ATOMIC FORCE MICROSCOPY;

EID: 0032634666     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341185     Document Type: Conference Paper

References (21)