Micromachined pattern transfer into CVD diamond

Diamond and Related Materials

Volumn 7, Issue 8, 1998, Pages 1148-1154

  Jubber, M G ^a   McLaughlin, A J ^a   Marsh, J H ^a   Aitchison, J S ^a   John, P ^b   Troupe, C E ^b   Wilson, J I B ^b  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

Diamond films; Modelling; Silicon substrate; Thermal management

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; HEAT SINKS; SILICON WAFERS; THERMAL CONDUCTIVITY OF SOLIDS;

THERMAL MANAGEMENT; WET ETCHING;

DIAMOND FILMS;

EID: 0032136318     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00164-2     Document Type: Article

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