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Applied Physics A: Materials Science and Processing

Volumn 77, Issue 5, 2003, Pages 627-632

Synthesis of epitaxial γ-Al2O3 thin films by thermal oxidation of AlN/sapphire(0001) thin films

(6) Kang, H C a Seo, S H a Jang, H W a Kim, D H a Kim, J W a Noh, D Y a

a Gwangju Institute of Science and Technology (GIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM NITRIDE; ANNEALING; ELECTROMAGNETIC WAVE SCATTERING; EPITAXIAL GROWTH; GRAIN GROWTH; NUCLEATION; OXIDATION; SAPPHIRE; SYNTHESIS (CHEMICAL);

CRYSTAL DOMAIN SIZE;

THIN FILMS;

EID: 0041942746 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-1510-9 Document Type: Article

Times cited : (7)

References (26)

1
- 36449007743
- K.S. Stevens, M. Kinniburgh, A.F. Schwartzman, A. Ohtani, R. Beresford: Appl. Phys. Lett. 66, 3179 (1995)
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3179
- Stevens, K.S.¹ Kinniburgh, M.² Schwartzman, A.F.³ Ohtani, A.⁴ Beresford, R.⁵

2
- 0025698139
- M. Ishida, M. Ashiki, K. Sawada, S. Yamaguchi, T. Nakamura: Sens. Actuators A 21-23, 267 (1990)
- (1990) Sens. Actuators A , vol.21-23 , pp. 267
- Ishida, M.¹ Ashiki, M.² Sawada, K.³ Yamaguchi, S.⁴ Nakamura, T.⁵

3
- 4143119129
- S.S.P. Parkin, K.P. Roche, M.G. Sammant, P.M. Rice, R.B. Beyers, R.E. Scheuerlein, E.J. O'Sullivan, S.L. Brown, J. Bucchigano, D.W. Abraham, Y. Lu, M. Rooks, P.L. Trouilloud, R.A. Wanner, W.J. Galagher: J. Appl. Phys. 85, 5828 (1999)
- (1999) J. Appl. Phys. , vol.85 , pp. 5828
- Parkin, S.S.P.¹ Roche, K.P.² Sammant, M.G.³ Rice, P.M.⁴ Beyers, R.B.⁵ Scheuerlein, R.E.⁶ O'Sullivan, E.J.⁷ Brown, S.L.⁸ Bucchigano, J.⁹ Abraham, D.W.¹⁰ Lu, Y.¹¹ Rooks, M.¹² Trouilloud, P.L.¹³ Wanner, R.A.¹⁴ Galagher, W.J.¹⁵

4
- 79955984697
- V.V. Afanas'ev, A. Stesmans: Appl. Phys. Lett. 80, 1261 (2002)
- (2002) Appl. Phys. Lett. , vol.80 , pp. 1261
- Afanas'Ev, V.V.¹ Stesmans, A.²

5
- 0343878184
- D.S. Song, J.K. Hwang, C.K. Kim, I.Y. Han, D.H. Jang, Y.H. Lee: IEEE Photon. Technol. Lett. 12, 954 (2000)
- (2000) IEEE Photon. Technol. Lett. , vol.12 , pp. 954
- Song, D.S.¹ Hwang, J.K.² Kim, C.K.³ Han, I.Y.⁴ Jang, D.H.⁵ Lee, Y.H.⁶

6
- 0041849895
- Y.-C. Jung, H. Wado, K. Ohtani, M. Ishida: Appl. Phys. Lett. 68, 3001 (1996)
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3001
- Jung, Y.-C.¹ Wado, H.² Ohtani, K.³ Ishida, M.⁴

7
- 79956035450
- J.S. Bae, K.H. Shin, T.D. Lee, H.M. Lee: Appl. Phys. Lett. 80, 1168 (2002)
- (2002) Appl. Phys. Lett. , vol.80 , pp. 1168
- Bae, J.S.¹ Shin, K.H.² Lee, T.D.³ Lee, H.M.⁴

8
- 34047177208
- T. Maruyama, T. Nakai: Appl. Phys. Lett. 58, 2079 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2079
- Maruyama, T.¹ Nakai, T.²

9
- 14344277175
- C. Krug, E.B.O. da Rosa, R.M.C. de Almeida, J. Morais, I.J.R. Baumvol, T.D. M. Sagado, F.C. Stedile: Phys. Rev. Lett. 85, 4120 (2000)
- (2000) Phys. Rev. Lett. , vol.85 , pp. 4120
- Krug, C.¹ Da Rosa, E.B.O.² De Almeida, R.M.C.³ Morais, J.⁴ Baumvol, I.J.R.⁵ Sagado, T.D.M.⁶ Stedile, F.C.⁷

10
- 0034272593
- Q. Li, Y.-H. Yu, C.S. Bhatia, L.D. Marks, S.C. Lee, Y.W. Chung: J. Vac. Sci, Technol. A18, 2333 (2000)
- (2000) J. Vac. Sci, Technol. A , vol.18 , pp. 2333
- Li, Q.¹ Yu, Y.-H.² Bhatia, C.S.³ Marks, L.D.⁴ Lee, S.C.⁵ Chung, Y.W.⁶

11
- 0034317394
- M.S.M. Saifullah, K. Kurihara, K. Kurihara, C.J. Humphreys: J. Vac. Sci. Technol. B 18, 2737 (2000)
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 2737
- Saifullah, M.S.M.¹ Kurihara, K.² Kurihara, K.³ Humphreys, C.J.⁴

12
- 0032023698
- D.R. Clarke: Phys. Status Solidi A 166, 183 (1998)
- (1998) Phys. Status Solidi A , vol.166 , pp. 183
- Clarke, D.R.¹

13
- 0001759257
- N. Yu, T.W. Simpson, P.C. Mclntyre, M. Nastasi, I.V. Mitchell: Appl. Phys. Lett. 67, 924 (1995)
- (1995) Appl. Phys. Lett. , vol.67 , pp. 924
- Yu, N.¹ Simpson, T.W.² Mclntyre, P.C.³ Nastasi, M.⁴ Mitchell, I.V.⁵

14
- 0035395260
- S. Guha, E. Cartier, N.A. Bojarczuk, J. Bruley, L. Gignac, J. Karahinski: J. Appl. Phys. 90, 512 (2001)
- (2001) J. Appl. Phys. , vol.90 , pp. 512
- Guha, S.¹ Cartier, E.² Bojarczuk, N.A.³ Bruley, J.⁴ Gignac, L.⁵ Karahinski, J.⁶

15
- 0011336270
- Y.-C. Jung, H. Miura, M. Ishida: Jpn. J. Appl. Phys. Part 1 38, 2333 (1999)
- (1999) Jpn. J. Appl. Phys. Part 1 , vol.38 , pp. 2333
- Jung, Y.-C.¹ Miura, H.² Ishida, M.³

16
- 0031146767
- E.A. Chowdhury, J. Kolodzey, J.O. Olowolafe, G. Qiu, G. Katulka, D. Hits, M. Dashiell, C.P. Swann, K.M. Unruh: Appl. Phys. Lett. 70, 2732 (1997)
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2732
- Chowdhury, E.A.¹ Kolodzey, J.² Olowolafe, J.O.³ Qiu, G.⁴ Katulka, G.⁵ Hits, D.⁶ Dashiell, M.⁷ Swann, C.P.⁸ Unruh, K.M.⁹

17
- 0001633975
- J. Kolodzey, E.A. Chowdhury, G. Qui, J.O. Olowolafe, C.P. Swann, K.M. Unruh, J. Suehle, R.G. Wilson, J.M. Zavada: Appl. Phys. Lett. 71, 3802 (1997)
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3802
- Kolodzey, J.¹ Chowdhury, E.A.² Qui, G.³ Olowolafe, J.O.⁴ Swann, C.P.⁵ Unruh, K.M.⁶ Suehle, J.⁷ Wilson, R.G.⁸ Zavada, J.M.⁹

18
- 79956004707
- H.C. Kang, S.H. Seo, J.W. Kim, D.Y. Noh: Appl. Phys. Lett. 80, 1364 (2002)
- (2002) Appl. Phys. Lett. , vol.80 , pp. 1364
- Kang, H.C.¹ Seo, S.H.² Kim, J.W.³ Noh, D.Y.⁴

19
- 0033698345
- H.C. Kang, S.H. Seo, D.Y. Noh: Mater. Res. Soc. Symp. Proc. 590, 195 (2000)
- (2000) Mater. Res. Soc. Symp. Proc. , vol.590 , pp. 195
- Kang, H.C.¹ Seo, S.H.² Noh, D.Y.³

20
- 0035382250
- H.C. Kang, S.H. Seo, D.Y. Noh: J. Mater. Res. 16, 1814 (2001)
- (2001) J. Mater. Res. , vol.16 , pp. 1814
- Kang, H.C.¹ Seo, S.H.² Noh, D.Y.³

21
- 0032022949
- K.H. Shim, J. Myoung, O. Gluschenkov, K. Kim, C. Kim, I.K. Robinson: Jpn. J. Appl. Phys. 37, L313 (1998)
- (1998) Jpn. J. Appl. Phys. , vol.37
- Shim, K.H.¹ Myoung, J.² Gluschenkov, O.³ Kim, K.⁴ Kim, C.⁵ Robinson, I.K.⁶

22
- 0038973267
- F. Bartolucci, G. Schmitz, P. Gassmann, R. Franchy: J. Appl. Phys. 80, 6467 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 6467
- Bartolucci, F.¹ Schmitz, G.² Gassmann, P.³ Franchy, R.⁴

23
- 0041849892
- H. Takahashi, T. Sato, S. Ito, K. Akashi: J. Ceram. Soc. Jpn. 104, 590 (1996)
- (1996) J. Ceram. Soc. Jpn. , vol.104 , pp. 590
- Takahashi, H.¹ Sato, T.² Ito, S.³ Akashi, K.⁴

24
- 0003472812
- (Addison-Wesley, Reading MA) Chap. 13
- B.E. Warren: X-ray Diffraction (Addison-Wesley, Reading MA 1969) Chap. 13
- (1969) X-ray Diffraction
- Warren, B.E.¹

25
- 26144449160
- L.G. Parratt: Phys. Rev. 95, 359 (1954)
- (1954) Phys. Rev. , vol.95 , pp. 359
- Parratt, L.G.¹

26
- 0000860047
- F.H. Streitz, J.W. Mintmire: Phys. Rev. B 60, 773 (1999)
- (1999) Phys. Rev. B , vol.60 , pp. 773
- Streitz, F.H.¹ Mintmire, J.W.²

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