Hole trapping in ultrathin Al2O3 and ZrO2 insulators on silicon

Applied Physics Letters

Volumn 80, Issue 7, 2002, Pages 1261-1263

  Afanas'ev, V V ^a   Stesmans, A ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON HOLE PAIRS; HOLE TRAPPING; METAL OXIDES; OPTICAL INJECTION; OXIDE CHARGING; POSITIVE CHARGES; THICK LAYERS; THIN LAYERS; ULTRA-THIN;

SILICON COMPOUNDS; SILICON OXIDES; ZIRCONIUM ALLOYS;

ALUMINUM;

EID: 79955984697     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1447006     Document Type: Article

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