Preparation and characterization of thin, well-ordered aluminum oxynitride films on NiAl(001)

Journal of Applied Physics

Volumn 80, Issue 11, 1996, Pages 6467-6473

  Bartolucci, F ^a   Schmitz, G ^a   Gassmann, P ^a   Franchy, R ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038973267     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363666     Document Type: Article

References (41)

1. C. F. Chen, E. Savrun, and A. F. Ramirez, in Ceramics Today - Tomorrow's Ceramics, edited by P. Vincenzini (Elsevier, Amsterdam, 1991), p. 1295.
2. N. D. Corbin, J. Eur. Ceram. Soc. 5, 143 (1989).
3. T. M. Hartnett, E. A. Maguire, R. L. Gentilman, N. D. Corbin, and J. W. McCauley, Ceram. Eng. Sci. Proc. 3, 67 (1982)..
4. P. Gassmann, R. Franchy, and H. Ibach, Surf. Sci. 319, 95 (1994).
5. P. Gassmann, R. Franchy and H. Ibach, J. Electron Spectrosc. Relat. Phenom. 64/65, 315 (1993).
6. P. Gassmann, F. Bartolucci, and R. Franchy, J. Appl. Phys. 77, 5718 (1995).
7. G. Schmilz, F. Bartolucci, P. Gassmann, and R. Franchy, Surf. Sci. 352/ 353, 161 (1996).
8. H. L. Davis and J. R. Noonan, Mater. Res. Soc. Symp. Proc. 83, 3 (1987).
9. D. R. Mullins and S. H. Overbury, Surf. Sci. 199, 141 (1988).
10. H. Jagodzinski and H. Saalfeld, Z. Kristallogr. 110, 197 (1958).
11. H. Jagodzinski, in Problems of Nonstoichiometry, edited by A. Rabenau (North-Holland, Amsterdam, 1970), p. 131.
12. W. D. Kingery, H. K. Bowen, and D. R. Uhlmann, Introduction to Ceramics, 2nd ed. (Wiley, New York, 1976), p. 62.
13. H. Saalfeld, N. Jb. Miner. Abh. 95, 1 (1960).
14. Landolt-Börnstein, Vol. III/7b, edited by K.-H. Heliwege (Springer, Heidelberg, 1975).
15. A. M. Lejus, Rev. Hautes Temp. Refrac. 1, 53 (1964).
16. H. Saalfeld and B. Mehrotra, Ber. Deut. Keram. Ges. 42, 161 (1965).
17. S. J. Wilson, Mineral Mag. 43, 281 (1979).
18. B. C. Lippens and J. H. de Boer, Acta Crystallogr. 17, 1312 (1964).
19. S. Geller, J. Chem. Phys. 33, 676 (1960).
20. G. Yamaguchi and H. Yanagida, Chem. Soc. Jpn. Bull. 32, 1264 (1959).
21. I. Adams, T. R. AuCoin, and G. A. Wolff, J. Electrochem. Soc. 109, 1050 (1962).
22. J. W. McCauley, J. Am. Ceram. Soc. 61, 372 (1978).
23. P. Goursat, M. Billey, P. Goeuriot, J. C. Labbe, J. M. Villechenoux, and G. Roult, J. Bardolle, Mater. Chem. 6, 81 (1981).
24. J. Sappei, D. Goeuriot, F. Thevenot, Y. Laurent, J. Guyader, and P. L'Haridon, J. Eur. Ceram. Soc. 8, 257 (1991).
25. H. X. Willems, M. M. R. M. Hendrix, R. Metselaar, and G. de With, J. Eur. Ceram. Soc. 10, 327 (1992).
26. H. X. Willems, M. M. R. M. Hendrix, G. de With, and R. Metselaar, J. Eur. Ceram. Soc. 10, 339 (1992).
27. H. X. Willems, G. de With, and R. Metselaar, J. Eur. Ceram. Soc. 12, 43 (1993).
28. A. Granon, P. Goeuriot, F. Thevenot, J. Guyader, P. L'Haridon, and Y. Laurent, J. Eur. Ceram. Soc. 13, 365 (1994).
29. H. Ibach, Electron Energy Loss Spectrometers, The Technology of High Performance, Springer Series in Optical Sciences, No. 63 (Springer, Heidelberg, 1991).
30. A. Chedin, C. Amiot, and Z. Cihla, J. Mol. Spectrosc. 63, 348 (1976).
31. G. Schmitz and R. Franchy (unpublished results, 1995).
32. P. Gassmann and R. Franchy (unpublished results, 1992).
33. R. H. French, J. Am. Ceram. Soc. 73, 477 (1990).
34. F. S. Ohuchi and R. H. French, J. Vac. Sci. Technol. A 6, 1695 (1988).
35. F. S. Ohuchi, R. H. French, and R. V. Kasowski, J. Appl. Phys. 62, 2286 (1987).
36. L. J. Brillson, Phys. Rev. B 18, 2431 (1978).
37. F. S. Ohuchi, R. H. French, and R. V. Kasowski, J. Vac. Sci. Technol. A 5, 1175 (1987).
38. X. Z. Yang, L. Samuelson, and H. G. Grimmeis, J. Phys. C 17, 6521 (1994).
39. B. Ealet, M. H. Elyakhloufi, E. Gillet, and M. Ricci, Thin Solid Films 250, 92 (1994).
40. D. L. Cocke, E. D. Johnson, and R. P. Merrill, Catal. Rev. Sci. Eng. 26, 163 (1984).
41. C. D. Wagner, D. E. Passoja, H. J. Hillery, T. G. Kinisky, H. A. Six, W. T. Jansen and J. A. Taylor, J. Vac. Sci. Technol. 21, 933 (1982).