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Volumn 13, Issue 8, 2003, Pages 1999-2006

Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPLEXATION; COORDINATION REACTIONS; KETONES; ORGANIC SOLVENTS; RUTHENIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0041565413     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/b300517h     Document Type: Article
Times cited : (42)

References (58)
  • 27


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.