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Volumn 340, Issue 1, 1999, Pages 140-144
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Epitaxial growth of RuO2 thin films by metal-organic chemical vapor deposition
a a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CONDUCTIVITY;
ELECTRIC VARIABLES MEASUREMENT;
EPITAXIAL GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
RUTHENIUM COMPOUNDS;
TEMPERATURE;
ORIENTATION RELATIONSHIP;
ROOM TEMPERATURE RESISTIVITIES;
RUTHENIUM OXIDES;
THIN FILMS;
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EID: 0032624262
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)01396-0 Document Type: Article |
Times cited : (21)
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References (22)
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