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Volumn 340, Issue 1, 1999, Pages 140-144

Epitaxial growth of RuO2 thin films by metal-organic chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC VARIABLES MEASUREMENT; EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; RUTHENIUM COMPOUNDS; TEMPERATURE;

EID: 0032624262     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01396-0     Document Type: Article
Times cited : (21)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.