Chemical Vapor Deposition of Metallic Thin Films Using Homonuclear and Heteronuclear Metal Carbonyls

Chemistry of Materials

Volumn 9, Issue 5, 1997, Pages 1154-1158

  Boyd, Edwin P ^a   Ketchum, Douglas R ^a   Deng, Haibin ^a   Shore, Sheldon G ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000694668     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9605330     Document Type: Article

References (22)

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