메뉴 건너뛰기




Volumn 1, Issue 4, 2002, Pages 195-200

Intrinsic fluctuations in sub 10-nm double-gate MOSFETs introduced by discreteness of charge and matter

Author keywords

Charge carrier processes; Lithography; MOSFETS; Semiconductor device doping; Semiconductor device modeling; Stochastic processes

Indexed keywords

LONG-CHANNEL MOBILITY; SEMICONDUCTOR DEVICE DOPING; SEMICONDUCTOR DEVICE MODELING;

EID: 0041537563     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2002.807392     Document Type: Conference Paper
Times cited : (97)

References (22)
  • 3
    • 0035717886 scopus 로고    scopus 로고
    • Examination of design and manufacturing issues in a 10 nm double gate MOSFET using nonequilibrium Green's function simulations
    • Z. Ren, R. Venugopal, S. Datta, and M. Lundstrom, "Examination of design and manufacturing issues in a 10 nm double gate MOSFET using nonequilibrium Green's function simulations," IEDM Tech. Dig., pp. 107-110, 2001.
    • (2001) IEDM Tech. Dig. , pp. 107-110
    • Ren, Z.1    Venugopal, R.2    Datta, S.3    Lundstrom, M.4
  • 5
    • 0036498483 scopus 로고    scopus 로고
    • Design considerations for CMOS near the limits of scaling
    • D. J. Frank and Y. Taur, "Design considerations for CMOS near the limits of scaling," Solid-State Electron., vol. 46, pp. 315-320, 2002.
    • (2002) Solid-state Electron. , vol.46 , pp. 315-320
    • Frank, D.J.1    Taur, Y.2
  • 6
    • 0035714801 scopus 로고    scopus 로고
    • FD/DG-SOI MOSFET - A viable approach to overcoming the device scaling limit
    • D. Hisamoto, "FD/DG-SOI MOSFET - A viable approach to overcoming the device scaling limit," IEDM Tech. Dig., pp. 429-532, 2001.
    • (2001) IEDM Tech. Dig. , pp. 429-532
    • Hisamoto, D.1
  • 8
    • 0002899780 scopus 로고    scopus 로고
    • Multi-dimensional quantum effects simulation using a density-gradient model and script-level programming technique
    • K. De Meyer and S. Biesemans, Eds.
    • C. S. Rafferty, B. Biegel, Z. Yu, M. G. Ancona, J. Bude, and R. W. Dutton, "Multi-dimensional quantum effects simulation using a density-gradient model and script-level programming technique," in Proc. SISPAD, K. De Meyer and S. Biesemans, Eds., 1998, pp. 137-140.
    • (1998) Proc. SISPAD , pp. 137-140
    • Rafferty, C.S.1    Biegel, B.2    Yu, Z.3    Ancona, M.G.4    Bude, J.5    Dutton, R.W.6
  • 9
    • 0031078966 scopus 로고    scopus 로고
    • Electron and hole quantization and their impact on deep submicron silicon p- and n-MOSFET characteristics
    • S. Jallepalli, J. Bude, W.-K. Shih, M. R. Pinto, C. M. Maziar, and A. F. Tasch Jr, "Electron and hole quantization and their impact on deep submicron silicon p- and n-MOSFET characteristics," IEEE Trans. Electron Devices, vol. 44, pp. 297-303, 1997.
    • (1997) IEEE Trans. Electron Devices , vol.44 , pp. 297-303
    • Jallepalli, S.1    Bude, J.2    Shih, W.-K.3    Pinto, M.R.4    Maziar, C.M.5    Tasch Jr., A.F.6
  • 10
    • 0033281305 scopus 로고    scopus 로고
    • Monte Carlo modeling of threshold variation due to dopant fluctuations
    • D. J. Frank, Y. Taur, and H.-S. P. Wong, "Monte Carlo modeling of threshold variation due to dopant fluctuations," in Proc. Symp. VLSI Technology, 1999, pp. 169-170.
    • (1999) Proc. Symp. VLSI Technology , pp. 169-170
    • Frank, D.J.1    Taur, Y.2    Wong, H.-S.P.3
  • 11
    • 0032320827 scopus 로고    scopus 로고
    • Random dopant induced threshold voltage lowering and fluctuations in sub 0.1 μm MOSFETs: A 3-D 'atomistic' simulation study
    • A. Asenov, "Random dopant induced threshold voltage lowering and fluctuations in sub 0.1 μm MOSFETs: A 3-D 'atomistic' simulation study," IEEE Trans. Electron Devices, vol. 45, pp. 2505-2513, 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 2505-2513
    • Asenov, A.1
  • 12
    • 85031637284 scopus 로고    scopus 로고
    • Modeling of deep-submicrometer MOSFETs, random impurity effects, threshold voltage shifts and gate capacitance attenuation
    • D. Vasileska, W. J. Gross, and D. K. Ferry, "Modeling of deep-submicrometer MOSFETs, random impurity effects, threshold voltage shifts and gate capacitance attenuation," in Proc. IWCE-6, 1998, pp. 259-262.
    • (1998) Proc. IWCE-6 , pp. 259-262
    • Vasileska, D.1    Gross, W.J.2    Ferry, D.K.3
  • 13
    • 0034453468 scopus 로고    scopus 로고
    • Random telegraph signal amplitudes in sub 100 nm (Decanano) MOSFETs: A 3-D 'atomistic' simulation study
    • A. Asenov, R. Balasubramaniam, A. R. Brown, J. H. Davies, and S. Saini, "Random telegraph signal amplitudes in sub 100 nm (Decanano) MOSFETs: A 3-D 'atomistic' simulation study," IEDM Tech. Dig., pp. 279-282, 2000.
    • (2000) IEDM Tech. Dig. , pp. 279-282
    • Asenov, A.1    Balasubramaniam, R.2    Brown, A.R.3    Davies, J.H.4    Saini, S.5
  • 14
    • 0035695567 scopus 로고    scopus 로고
    • 3D modeling of fluctuation effects in highly scaled VLSI devices
    • T. D. Linton, S. Yu, and R. Shaheed, "3D modeling of fluctuation effects in highly scaled VLSI devices," VLSI Des., vol. 13, pp. 103-109, 2001.
    • (2001) VLSI Des. , vol.13 , pp. 103-109
    • Linton, T.D.1    Yu, S.2    Shaheed, R.3
  • 15
    • 0033714120 scopus 로고    scopus 로고
    • Modeling line edge roughness effects in sub 100 nanometer gate length devices
    • P. Oldiges, Q. Lin, K. Perillo, M. Sanchez, M. Ieong, and M. Hargrove, "Modeling line edge roughness effects in sub 100 nanometer gate length devices," in Proc. SISPAD, 2000, pp. 131-134.
    • (2000) Proc. SISPAD , pp. 131-134
    • Oldiges, P.1    Lin, Q.2    Perillo, K.3    Sanchez, M.4    Ieong, M.5    Hargrove, M.6
  • 16
    • 0003161077 scopus 로고    scopus 로고
    • Analysis of statistical fluctuations due to line edge roughness in sub 0.1 μm MOSFETs
    • D. Tsoukalas and C. Tsamis, Eds. Vienna, Switzerland: Springer-Verlag
    • S. Kaya, A. R. Brown, A. Asenov, D. Magot, and T. Linton, "Analysis of statistical fluctuations due to line edge roughness in sub 0.1 μm MOSFETs," in Simulation of Semiconductor Processes and Devices 2001, D. Tsoukalas and C. Tsamis, Eds. Vienna, Switzerland: Springer-Verlag, 2001, pp. 78-8.
    • (2001) Simulation of Semiconductor Processes and Devices 2001 , pp. 78-78
    • Kaya, S.1    Brown, A.R.2    Asenov, A.3    Magot, D.4    Linton, T.5
  • 17
    • 0035307248 scopus 로고    scopus 로고
    • Increase in the random dopant induced threshold fluctuations and lowering in sub 100 nm MOSFETs due to quantum effects: A 3-D density-gradient simulation study
    • A. Asenov, G. Slavcheva, A. R. Brown, J. H. Davies, and S. Saini, "Increase in the random dopant induced threshold fluctuations and lowering in sub 100 nm MOSFETs due to quantum effects: A 3-D density-gradient simulation study," IEEE Trans. Electron Devices, vol. 48, pp. 722-729, 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , pp. 722-729
    • Asenov, A.1    Slavcheva, G.2    Brown, A.R.3    Davies, J.H.4    Saini, S.5
  • 18
    • 0042111732 scopus 로고    scopus 로고
    • Can the density gradient approach describe the source-drain tunnelling in decanano double-gate MOSFETs?
    • J. R. Watling, A. R. Brown, and A. Asenov, "Can the density gradient approach describe the source-drain tunnelling in decanano double-gate MOSFETs?," J. Comput. Electron., vol. 1, pp. 289-293, 2002.
    • (2002) J. Comput. Electron. , vol.1 , pp. 289-293
    • Watling, J.R.1    Brown, A.R.2    Asenov, A.3
  • 22
    • 35949025938 scopus 로고
    • Discrete resistance switching in submicron silicon inversion layers: Individual interface traps and low frequency (1//) noise
    • K. S. Rals, W. L. Scokpol, L. D. Jakel, R. E. Howard, L. A. Fetter, R. W. Epworth, and D. M. Tennant, "Discrete resistance switching in submicron silicon inversion layers: Individual interface traps and low frequency (1//) noise," Phys. Rev. Lett., vol. 63, p. 228, 1984.
    • (1984) Phys. Rev. Lett. , vol.63 , pp. 228
    • Rals, K.S.1    Scokpol, W.L.2    Jakel, L.D.3    Howard, R.E.4    Fetter, L.A.5    Epworth, R.W.6    Tennant, D.M.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.