Micro-Hall devices: Performance, technologies and applications

Sensors and Actuators, A: Physical

Volumn 106, Issue 1-3, 2003, Pages 314-320

  Boero, G ^a   Demierre, M ^a   Besse, P A ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

Micro Hall devices; Scanning Hall probe microscopy

Indexed keywords

CARRIER CONCENTRATION; CHARGE CARRIERS; MAGNETIC FIELDS;

MICROFABRICATION;

HALL EFFECT DEVICES;

EID: 0041464605     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00192-4     Document Type: Conference Paper

References (80)

1. R.S. Popovic, Hall Effect Devices, Adam Hilger, Bristol, 1991.
2. H.H. Wieder, Hall Generators and Magnetoresistors, Pion Limited, London, 1971.
3. J. Heremans, Solid state magnetic field sensors and applications, J. Phys. D: Appl. Phys. 26 (1993) 1149-1168.
4. H. Baltes, R. Castagnetti, in: S.M. Sze (Ed.), Semiconductor Sensors, Wiley, London, 1994, Chapter 5, pp. 205-269.
5. B.K. Chong, H. Zhou, G. Mills, L. Donaldson, J.M.R. Weaver, Scanning Hall probe microscopy on an atomic force microscope tip, J. Vac. Sci. Technol. A 19 (2001) 1769-1772.
6. A. Sandhu, H. Masuda, K. Kurosawa, A. Oral, S.J. Bending, Bismuth nano-Hall probes fabricated by focused ion beam milling for direct magnetic imaging by room temperature scanning Hall probe microscopy, Electr. Lett. 37 (2001) 1335-1336.
7. A. Sandhu, H. Masuda, A. Oral, S.J. Bending, Room temperature magnetic imaging of magnetic storage media and garnet epilayers in the presence of external magnetic fields using sub-micron GaAs SHPM, J. Cryst. Growth 227-228 (2001) 899-905.
8. A.M. Chang, H.D. Hallen, L. Harriott, H.F. Hess, H.L. Kao, J. Kwo, R.E. Miller, R. Wolfe, J. van der Ziel, T.Y. Chang, Scanning Hall probe microscopy, Appl. Phys. Lett. 61 (1992) 1974-1976.
9. L. Theil Kuhn, A.K. Geim, J.G.S. Lok, P. Hedegard, K. Ylanen, J.B. Jensen, E. Johnson, P.E. Lindelof, Magnetization of isolated single crystalline Fe-nanoparticles by a ballistic Hall micro-magnetometer, Eur. Phys. J. D 10 (2000) 259-263.
10. Y. Li, P. Xiong, S. von Molnar, S. Wirth, Y. Ohno, H. Ohno, Hall magnetometry on a single iron nanoparticle, Appl. Phys. Lett. 80 (2002) 1-3.
11. S. Wirth, S. von Molnar, Hall cross scaling and its application to measurements on nanometer-size iron particle arrays, Appl. Phys. Lett. 76 (2000) 3283-3285.
12. A.K. Geim, S.V. Dubonos, I.V. Grigorieva, K.S. Novoselov, P.M. Peelers, V.A. Schweigert, Non-quantized penetration of magnetic field in the vortex state of superconductors, Nature 407 (2000) 55-57.
13. 8, Nature 375 (1995) 373-376.
14. T. Fukumura, H. Sugawara, T. Hasegawa, K. Tanaka, H. Sakaki, T. Kimura, Y. Tokura, Spontaneous bubble domain formation in a layered ferromagnetic crystal, Science 284 (1999) 1969-1971.
15. A. Thiaville, L. Belliard, D. Majer, E. Zeldov, J. Miltat, Measurement of the stray field emanating from magnetic force microscope tips by Hall effect microsensors, J. Appl. Phys. 82 (1997) 3182-3191.
16. S.A. Solin, R.A. Stradling, T. Thio, J.W. Bennet, Thin, horizontal-plane Hall sensors for read heads in magnetic recording, Meas. Sci. Technol. 8 (1997) 1174-1181.
17. F.G. Monzon, M. Johnson, M.L. Roukes, Strong Hall voltage modulation in hybrid ferromagnet/semiconductor microstructures, Appl. Phys. Lett. 71 (1997) 3087-3089.
18. M. Johnson, B.R. Bennet, M.I Yang, M.M. Miller, B.V. Shanabrook, Hybrid Hall effect device, Appl. Phys. Lett. 71 (1997) 974-976.
19. M. Demierre, S. Pesenti, J. Frounchi, P.A. Besse, R.S. Popovic, Reference magnetic actuator for self-calibration of very small Hall sensor array, Sens. Actuators A 97-98 (2002) 39-46.
20. P.A. Besse, G. Boero, M. Demiorre, V. Pott, R. Popovic, Detection of a single magnetic microbead using a miniaturized silicon Hall sensor, Appl. Phys. Lett. 80 (2002) 4199-4201.
21. G. Boero, P.A. Besse, R.S. Popovic, Hall detection of magnetic resonance, Appl. Phys. Lett. 79 (2001) 1498-1500.
22. N.W. Ashcroft, N.D. Mermin, Solid State Physics, Saunders College, Philadelphia, 1976.
23. S. Liu, H. Guillou, A.D. Kent, G.W. Stupian, M.S. Leung, Effect of probe geometry on the Hall response in a inhomogeneous magnetic field: a numerical study, J. Appl. Phys. 83 (1998) 6161-6165.
24. V.N. Dobrovolsky, A.N. Krolevets, Theory of magnetic-field-sensitive metal-oxide-semiconductor field-effect transistors, J. Appl. Phys. 85 (1999) 1956-1960.
25. G. De Mey, Potential calculation in Hall plates, Adv. Electr. Electr. Phys. 61 (1983) 1-62.
26. V.N. Dobrovolsky, A.N. Krolevets, Hall current and its use in investigation of semiconductors (review), Sov. Phys. Semicond. 17 (1983) 1-7.
27. C. Maier, M. Emmenegger, S. Taschini, H. Baltes, J.G. Korvink, Equivalent circuit model of resistive IC sensors with the box integration method, IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst. 18 (1999) 1000-1013.
28. R.S. Popovic, Numerical analysis of MOS magnetic field sensors, Solid State Electron. 28 (1985) 711-716.
29. A. Okamoto, T. Yoshida, S. Muramatsu, I. Shibasaki, Magneto-resistance effect in InSb thin film grown using molecular beam epitaxy, J. Cryst. Growth 201-202 (1999) 765-768.
30. F.N. Hooge, 1/f noise sources, IEEE Trans. Electr. Dev. 41 (1994) 1926-1935.
31. P.J.A. Munter, A low-offset spinning-current Hall plate, Sens. Actuators A 21-23 (1990) 743-746.
32. R. Steiner, Ch. Maier, A. Hàberli, F.-P. Steiner, H. Baltes, Offset reduction in Hall devices by continuous spinning current method, Sens. Actuators A 66 (1998) 167-172.
33. S. Bellekom, CMOS versus bipolar Hall plates regarding offset correction. Sens. Actuators A 76 (1999) 178-182.
34. Y. Sugiyama, H. Soga, M. Tacano, H.P. Baltes, Highly sensitive split-contact magnetoresistor with AlAs/GaAs superlattice structures, IEEE Trans. Electr. Dev. 36 (1989) 1639-1643.
35. S.A. Solin, T. Thio, D.R. Hines, J.J. Heremans, Enhanced room-temperature geometric magnetoresistance in inhomogeneous narrow-gap semiconductors, Science 289 (2000) 1530-1532.
36. T. Zhou, D.R. Hines, S.A. Solin, Extraordinary magnetoresistance in externally shunted van der Pauw plates, Appl. Phys. Lett. 78 (2001) 667-669.
37. S.A. Solin, D.R. Hines, A.C.H. Rowe, Nonmagnetic semiconductors as read head sensors for ultra-high-density magnetic recording, Appl. Phys. Lett. 80 (2002) 4012-4014.
38. J. Moussa, L.R. Ram-Mohan, J. Sullivan, T. Zhou, D.R. Hines, S.A. Solin, Finite-element modeling of extraordinary magnetoresistance in thin film semiconductors with metallic inclusions, Phys. Rev. B 64 (2001) 184410.1-184410.8.
39. W.J. Grande, S. Reznik, J. Ertel, A Hall effect microsensor for micromechanical device characterization, IEEE Trans. Magn. 33 (1997) 3394-3396.
40. Ahahi Kasei Electronics Co., http://www.asahi-kasei.co.jp.
41. Emcore Co., http://www.emcore.com.
42. Bell Technologies Inc., http://www.fwbell.com.
43. T.G.M. Kleinpenning, Design of an AC micro-Gauss sensor, Sens. Actuators 4 (1983) 3-9.
44. M. Behet, J. Bekaert, J. De Boek, G. Borghs, InAs/AlGaSb quantum well Hall effect sensors, Sens. Actuators A 81 (2000) 13-17.
45. M. Behet, J. Das, J. De Boeck, G. Borghs, InAs/(Al, Ga)Sb quantum well structures for magnetic sensors, IEEE Trans. Magn. 34 (1998) 1300-1302.
46. J. Bekaert, V.V. Moshchatkov, Y. Bruynseraede, M. Behet, J. De Boeck, G. Borghs, InAs/AlGaSb quantum well Hall sensors with improved temperature stability, Rev. Sci. Instrum. 70 (1999) 2715-2718.
47. Y. Sugiyama, Temperature dependence of an InGaAs-2DEG Hall device with large magnetic sensitivity, Sens. Actuators A 40 (1994) 135-140.
48. Y. Sugiyama, Recent progress on magnetic sensors with nanostructures and applications, J. Vac. Sci. Technol. B 13 (1995) 1075-1083.
49. R.S. Popovic, Z. Randjelovic, D. Manic, Integrated Hall effect magnetic sensors, Sens. Actuators A 91 (2001) 46-50.
50. B. Janossy, Y. Haddab, J.M. Villiot, R.S. Popovic, Hot carrier Hall devices in CMOS technology, Sens. Actuators A 71 (1998) 172-178.
51. T. Kanayama, H. Hiroshima, M. Komuro, Miniature Hall sensor fabricated with maskless ion implantation, J. Vac. Sci. Technol. B 6 (1988) 1010-1013.
52. V. Cambel, G. Karapetrov, P. Elias, S. Hasenohrl, W.K. Kwok, J. Krause, J. Manka, Approaching the pT range with 2DEG InGaAs/InP Hall sensors at 77 K, Microelectr. Eng. 51-52 (2000) 333-342.
53. R.G. van Veen, A.H. Verbruggen, E. van der Drift, S. Radelaar, S. Anders, H.M. Jaeger, Micron-sized Hall probes on a Si/SiGe heterostructure as a tool to study vortex dynamics in high-temperature superconducting crystals, Rev. Sci. Instrum. 70 (1999) 1767-1770.
54. Y. Sugiyama, S. Kataoka, S/N studies of micro-Hall sensors made of single crystal InSb and GaAs, Sens. Actuators 8 (1985) 29-38.
55. Y. Sugiyama, K. Sano, T. Sugaya, T. Nakagawa, Micro-Hall devices with high resolution made of d-doped InAlAs/InGaAs pseudomorphic hetorostructures, in: Proceedings of Transducers'95 and Eurosensors IX, Stockholm, Sweden, 25-29 June 1995, pp. 225-228.
56. A.K. Geim, S.V. Dubonos, J.G.S. Lok, I.V. Grigorieva, J.C. Maan, L.T. Hansen, P.E. Lindelof, Ballistic Hall micromagnetometry, Appl. Phys. Lett. 71 (1997) 2379-2381.
57. S.J. Bending, A. Oral, Hall effect in a highly inhomogeneous magnetic field distribution, J. Appl. Phys. 81 (1997) 3721-3725.
58. T. Schweinbock, D. Weiss, M. Lipinski, K. Eberl, Scanning Hall probe microscopy with shear force distance control, J. Appl. Phys. 87 (2000) 6496-6498.
59. F.Y. Yang, K. Liu, K. Hong, D.H. Reich, P.C. Searson, C.L. Chien, Large magnetoresistance of electrodeposited single-crystal bismuth thin films, Science 284 (1999) 1335-1337.
60. S.J. Bending, Local magnetic probes of superconductors, Adv. Phys. 48 (1999) 449-535.
61. A. de Lozanne, Scanning probe microscopy of high-temperature superconductors, Supercond. Sci. Technol. 12 (1999) R43-R56.
62. P.J.A. van Schendel, H.J. Hug, B. Stiefel, S. Martin, H.-J. Guntherodt, A method for the calibration of magnetic force microscopy tips, J. Appl. Phys. 88 (2000) 435-445.
63. L. Folks, M.E. Best, P.M. Rice, B.D. Terris, D. Weller, J.N. Chapman, Perforated tips for high-resolution in-plane magnetic force microscopy, Appl. Phys. Lett. 76 (2000) 909-911.
64. T.G. Ruskell, M. Löhndorf, J. Moreland, Field mapping with the magnetic resonance force microscope, J. Appl. Phys. 86 (1999) 664-670.
65. M. Nakamura, M. Kimura, K. Sueoka, K. Mukasa, Scanning magnetoresistance microscopy with a magnetoresistive sensor cantilever, Appl. Phys. Lett. 80 (2002) 2713-2715,
66. S.Y. Yamamoto, S. Schultz, Scanning magnetoresistance, Appl. Phys. Lett. 69 (1996) 3263-3265.
67. J.R. Kirtley, SQUID microscopy for fundamental studies, Physica C 368 (2002) 55-65.
68. V. Polushskin, M. Wallis, D. Glowacka, A. Matthews, J.M. Lumley, A miniature magnetometer based on the superconducting quantum interference device with direct readout electronics, Rev. Sci. Instrum. 68 (1997) 1461-1464.
69. J.R. Kirtley, M.B. Ketchen, K.G. Stawiasz, J.Z. Sun, W.J. Gallagher, S.H. Blanton, S.J. Wind, High resolution scanning SQUID microscope, Appl. Phys. Lett. 66 (1995) 1138-1140.
70. P.L.C. Simon, P.H.S. de Vries, S. Middelhoek, Autocalibration of silicon Hall sensors, Sens. Actuators A 52 (1996) 203-207.
71. R. Blakemore, Magnetotactic bacteria (in geomagnetic field), Science 190 (1975) 377-379.
72. R.E. Dunin-Borkowsky, M.R. McCartney, R.B. Frankel, D.A. Bazylinski, M. Posfai, P.R. Buseck, Magnetic microstructure of magnetotactic bacteria by electron holography, Science 282 (1998) 1868-1870.
73. J.L. Kirschvink, Homing in on vertebrates, Nature 390 (1997) 339-340.
74. R.B. Proksch, T.E. Schaffer, B.M. Moskowitz, E.D. Dahlberg, D.A. Bazylinski, R.B. Frankel, Magnetic force microscopy of the submicron magnetic assembly in a magnetotactic bacterium, Appl. Phys. Lett. 66 (1995) 2582-2584.
75. I.M. Thomas, Y.P. Ma, S. Tan, J.P. Wikswo, Spatial resolution and sensitivity of magnetic susceptibility imaging, IEEE Trans. Appl. Supercond. 3 (1993) 1937-1940.
76. 0.67/Si(0 0 1) p-type modulation-doped heterostructures, Appl. Phys. Lett. 80 (2002) 3117-3119.
77. S.J. Bending, A. Oral, Hall effect in a highly inhomogeneous magnetic field distribution, J. Appl. Phys. 81 (1997) 3721-3725.
78. I.S. Ibrahim, V.A. Schweigen, F.M. Peeters, Diffusive transport in a Hall junction with microinhomogeneous magnetic field, Phys. Rev. B 57 (1998) 15416-15427.
79. K.V. Klitzing, G. Dorda, M. Pepper, New method for high-accuracy determination of the fine-structure constant based on quantized Hall resistance, Phys. Rev. Lett. 45 (1980) 494-497.
80. B.I. Halperin, The quantized Hall effect, Sci. Am. April (1986) 40-48.