Wear-resistant thin films of amorphous carbon nitride prepared by shielded arc ion plating

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 10 A, 1999, Pages

  Tajima, Nobuhiro ^a   Saze, Hiroki ^a   Sugimura, Hiroyuki ^a   Takai, Osamu ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; HARDNESS; SYNTHESIS (CHEMICAL); THIN FILMS; TRIBOLOGY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; NANOINDENTATION; SHIELDED ARC ION PLATING;

AMORPHOUS FILMS;

EID: 0033311819     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l1131     Document Type: Article

References (14)