Mechanical properties of carbon nitride thin films prepared by ion beam assisted filtered cathodic vacuum arc deposition

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 140-145

  Spaeth, C ^a   Kuhn M ^a   Chudoba, T ^a   Richter, F ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Adherence; Carbon nitride; Mechanical properties; Thin films

Indexed keywords

ADHESION; COMPRESSIVE STRESS; DEPOSITION; FINITE ELEMENT METHOD; HARDNESS TESTING; ION BEAMS; NITRIDES; THIN FILMS; TRIBOLOGY; VACUUM APPLICATIONS; WEAR RESISTANCE;

ABRASIVE WEAR TESTS; CARBON NITRIDE; INDENTATION TESTS; ION BEAM-ASSISTED FILTERED CATHODIC VACUUM ARC DEPOSITION;

AMORPHOUS FILMS;

EID: 0033077415     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00757-9     Document Type: Article

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