Adsorption and desorption of deuterium on partially oxidized Si(100) surfaces

Physical Review B - Condensed Matter and Materials Physics

Volumn 67, Issue 15, 2003, Pages

  Tsurumaki, H ^a   Iwamura, K ^a   Karato, T ^a   Inanaga, S ^a   Namiki, A ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM; SILICON;

ADSORPTION; ARTICLE; CALCULATION; DESORPTION; MOLECULE; OXIDATION; TEMPERATURE;

EID: 0038120903     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.67.155316     Document Type: Article

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