Rate equations for collision-induced desorption and abstraction in the reaction system H(g) + D/Si(100)→D2,HD at 573 K

Journal of Chemical Physics

Volumn 113, Issue 9, 2000, Pages 3792-3801

  Khanom, F ^a   Shimokawa, S ^a   Inanaga, S ^a   Namiki, A ^a   N Gamo, M ^b   Ando, T ^b  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM; DIMERS; HYDRIDES; HYDROGEN; ISOTOPES; MOLECULAR DYNAMICS; NUMERICAL METHODS; QUANTUM THEORY; RATE CONSTANTS; SEMICONDUCTING SILICON; SURFACES; TEMPERATURE;

ABSTRACTION REACTIONS; COLLISION INDUCED DESORPTION; DIHYDRIDE; QUANTUM EFFECTS; RATE EQUATIONS; SECOND ORDER KINETICS;

CHEMICAL REACTIONS;

EID: 0034272107     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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