Kinetics study on the hydrogen atom-induced abstraction and associative desorption of deuterium adatoms from the Si(100) surface at 573 K

Journal of Chemical Physics

Volumn 112, Issue 1, 2000, Pages 356-365

  Shimokawa, S ^a   Namiki, A ^a   Ando, T ^b   Sato, Y ^b   Lee, J ^c  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001514593     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.480586     Document Type: Article

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