Metalorganic chemical vapor deposition of group III nitrides - A discussion of critical issues

Journal of Crystal Growth

Volumn 248, Issue SUPPL., 2003, Pages 479-486

  Keller, Stacia ^a   DenBaars, Steven P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

A1. Doping; A1. Segregation; A1. Surface processes; A1. Surface structure; A3. Metalorganic chemical vapor deposition; B1. Nitrides

Indexed keywords

METALLORGANIC VAPOR PHASE EPITAXY; OPTOELECTRONIC DEVICES; SEMICONDUCTOR DOPING; SURFACE STRUCTURE;

ELECTRONIC DEVICES;

NITRIDES;

EID: 0037292445     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01867-5     Document Type: Conference Paper

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