Surface modification with fluorocarbon thin films for the prevention of stiction in MEMS

Materials Research Society Symposium - Proceedings

Volumn 518, Issue , 1998, Pages 143-148

  Lee, Sang Ho ^a   Kwon, Myong Jong ^a   Park, Jin Goo ^a   Kim, Yong Kweon ^a   Shin, Hyung Jae ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; CONTACT ANGLE; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYSTERESIS; STICTION; SURFACE TREATMENT; THERMODYNAMIC STABILITY; THIN FILMS;

CAPTIVE DROP METHOD; CONTACT ANGLE HYSTERESIS; SPIN COATING; STRETCHING BAND;

MICROELECTROMECHANICAL DEVICES;

EID: 0032299796     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-518-143     Document Type: Conference Paper

References (14)