Multiterm solution of the reactive space-time-dependent Boltzmann equation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 316-323

  White, R D ^a   Robson, R E ^a   Ness, K F ^a  

^a JAMES COOK UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032331928     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580989     Document Type: Article

References (44)

1. M. A. Liebermann and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. T Makabe, Gaseous Electronics and its Applications, edited by R. W. Crompton, M. Hayashi, D. E. Boyd, and T. Makabe (KTS Scientific, Tokyo, 1991).
3. K. Kumar, H. R. Skullerud, and R.E. Robson Aust. J. Phys. 86, 845 (1980).
4. J. P. England and H. R. Skullerud, Aust. J. Phys. 50, 553 (1997).
5. R. E. Robson, Aust. J. Phys. 50, 577 (1997).
6. G. L. Braglia, and J. J. Lowke, J. Phys. D 12, 1831 (1979).
7. P. Segur, A. Alkaa, S. Pineau, A. Zahraoui, A. Chouke, C. Moutrade, and S. Laffont, Plasma Sources Sci. Teehnol. 4, 183 (1995).
8. R. Winkler, G. Petrov, F. Sigeneger, and D. Uhrlandt, Plasma Sources Sci. Teehnol. 6, 118 (1997).
9. C. Busch and U. Kortshagen, Phys. Rev. E 51, 280 (1995).
10. U. Kortshagen, C. Busch, and L. D. Tsendin, Plasma Sources Sci. Technol. 5, 1 (1996).
11. K. Maeda and T. Makabe, Jpn. J. Appl. Phys., Part 1 33, 4173 (1994a).
12. K. Maeda and T. Makabe, Phys. Scr. T53, 61 (1994b).
13. K. Maeda and T. Makabe, Proc. 17th XVII SPIG 65, Belgrade, 1994c (unpublished).
14. K. Maeda, J. Matsui, and T. Makabe, Proc. 12th Symp. Plasma Processing, Bologna, 1995 (unpublished).
15. R. D. White, R. E. Robson, and K. F. Ness, Aust. J. Phys. 48, 925 (1995).
16. S. A. Bzenic, K. Maeda, Z. Lj. Petrovic, and T. Makabe, Proc. 12th Symp. Plasma Processing, 1995 (unpublished).
17. R. D. White, PhD thesis, (James Cook University of North Queensland, 1996).
18. K. Maeda, T. Makabe, N. Nakano, S. Bzenic, and Z. Lj. Petrovic, Phys. Rev. E 55, 5901 (1997).
19. R. E. Robson and K. F. Ness, Phys. Rev. A 33, 2068 (1986).
20. E. A. Mason, and E. W. McDaniel, Transport Properties of Ions in Gases (Wiley, London, 1988).
21. L. A. Viehland, Status and Future Developments in Transport Properties, edited by W. A. Wakeham et al. (Dordrecht, Kluwer, 1994), p. 189.
22. K. F. Ness, J. Phys. C 27, 1848 (1994).
23. S. L. Lin, R. E. Robson, and E. A. Mason, J. Chem. Phys. 71, 3483 (1979).
24. R. D. White, Honours Thesis (James Cook University of North Queensland, Townsville, Australia, 1993).
25. R. E. Robson, K. Maeda, T. Makabe, and R. D. White, Aust. J. Phys. 48, 335 (1995).
26. D. Loffhagen and R. Winkler, J. Phys. D 29, 618 (1996a).
27. D. Loffhagen and R. Winkler, Plasma Sources Sci. Technol. 5, 710 (1996b).
28. M. Surendra, Plasma Sources Sci. Technol. 4, 56 (1995).
29. C. M. Ferreira, L. L. Alves, M. Pinheiro, and A. B. Sa, IEEE Trans. Plasma Sci. 19, 229 (1991).
30. R. Winkler, H. Deutsch, J. Wilhelm, and C. H. Wilke, Beitr. Plasma Phys. 24, 284 (1984).
31. W. L. Morgan and B. M. Penetrante, Comput. Phys. Commun. 58, 127 (1990).
32. T. Holstein, Phys. Rev. 70, 367 (1949).
33. A. D. MacDonald and S. C. Brown, Phys. Rev. 75, 411 (1949).
34. C. M. Ferreira and J. Loureiro, J. Phys. C 17, 1175 (1984).
35. C. M. Ferreira and J. Loureiro, J. Phys. C 22, 76 (1989).
36. H. Margenau and L. M. Hartman, Phys. Rev. 73, 309 (1948).
37. T. Makabe and N. Goto, J. Phys. D 21, 887 (1988).
38. J. Loureiro, Phys. Rev. E 47, 1262 (1993).
39. K. F. Ness and R. E. Robson, Phys. Rev. A 34, 2185 (1986).
40. L. Boltzmann, Wein. Ber. 66, 275 (1872).
41. C. S. Wang-Chang, G. E. Uhlenbeck, and J. De Boer, Studies in Statistical Mechanics, edited by J. De Boer and G. E. Uhlenbeck (Wiley, New York, 1964), Vol. II, p. 241.
42. R. E. Robson, Aust. J. Phys. 44, 685 (1991).
43. H. Tagashira, Y. Sakai, and S. Sakamoto, J. Phys. D 10, 1051 (1977).
44. J. Lucas and H. Saelee, J. Phys. D 8, 640 (1975).