Robot assisted optical emission tomography in an inductively coupled plasma reactor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 3, 1996, Pages 1890-1893

  Okigawa, Akifumi ^a   Makabe, Toshiaki ^a   Shibagaki, Takeshi ^a   Nakano, Nobuhiko ^a   Petrovic, Zoran Lj ^a,c   Kogawa, Takeki ^b   Itoh, Akihiko ^b  

^a KEIO UNIVERSITY   (Japan)

^b Shibaura Engineering Works Co Ltd   (Japan)

^c UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Computered tomography; Inductively coupled plasma; Net excitation rate

Indexed keywords

ARGON; COMPUTERIZED TOMOGRAPHY; FLOW OF FLUIDS; GASES; LIGHT EMISSION; PRESSURE; QUARTZ; ROBOT APPLICATIONS;

COAXIAL QUARTZ CYLINDER; INDUCTIVELY COUPLED PLASMA REACTOR; NET EXCITATION RATE; ONE TURN RADIOFREQUENCY CURRENT COIL; OPTICAL EMISSION TOMOGRAPHY; POWER DISSIPATION; RADIOFREQUENCY VOLTAGE;

PLASMA SOURCES;

EID: 0030101959     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.1890     Document Type: Article

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