Three dimensional optical emission tomography of an inductively coupled plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4605-4616

  Okigawa, Akifumi ^a   Tadokoro, Masahiro ^a   Itoh, Akihiko ^b   Nakano, Nobuhiko ^a   Petrović, Zoran Lj ^a,c   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

^b Shibaura Engineering Works Co Ltd   (Japan)

^c UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Argon; Computer tomography; Inductively coupled plasma; Net excitation rate; Plasma processing

Indexed keywords

ARGON; COMPUTERIZED TOMOGRAPHY; LIGHT EMISSION; PRESSURE EFFECTS;

INDUCTIVELY COUPLED PLASMAS (ICP); OPTICAL EMISSION TOMOGRAPHY;

PLASMAS;

EID: 0031176034     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4605     Document Type: Article

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