SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 7 A, 2000, Pages 4148-4152

Hardness and structure of a-CNx films synthesized by chemical vapor deposition

(6) Tanaka, Daisuke a Ohkawara, Yoshiaki a Itoh, Noriko a Ohshio, Shigeo a Ito, Haruhiko a Saitoh, Hidetoshi a

a NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

Carbon nitride; Chemical vapor deposition; Creep; Elastic recovery; FTIR; Hardness; Ion bombardment; Microwave plasma; Nano indentation; Young's modulus

Indexed keywords

ABSORPTION; ABSORPTION SPECTROSCOPY; BAND STRUCTURE; CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BOMBARDMENT; SYNTHESIS (CHEMICAL);

CARBON NITRIDE FILMS; DISSOCIATIVE EXCITATION REACTION; ELASTIC RECOVERY; INFRARED ABSORPTION SPECTRUM; NANOINDENTATION TESTS;

AMORPHOUS FILMS;

EID: 0034215922 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.4148 Document Type: Article

Times cited : (38)

References (12)

1
- 0001356099
- G. M. Pharr, D. L. Callahan, S. D. McAdams and T. Y. Tsui: Appl. Phys. Lett. 68 (1996) 779.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 779
- Pharr, G.M.¹ Callahan, D.L.² McAdams, S.D.³ Tsui, T.Y.⁴

2
- 0028415967
- G. Mariotto, F. L. Freire, Jr. and C. A. Achete: Thin Solid Films 241 (1994) 255.
- (1994) Thin Solid Films , vol.241 , pp. 255
- Mariotto, G.¹ Freire Jr., F.L.² Achete, C.A.³

3
- 0030647936
- F. L. Freire, Jr. and D. F. Franceschini: Thin Solid Films 293 (1997) 236.
- (1997) Thin Solid Films , vol.293 , pp. 236
- Freire Jr., F.L.¹ Franceschini, D.F.²

4
- 0033741057
- H. Saitoh, H. Takamatsu, D. Tanaka, N. Ito, S. Ohshio and H. Ito: Jpn. J. Appl. Phys. 39 (2000) 1258.
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 1258
- Saitoh, H.¹ Takamatsu, H.² Tanaka, D.³ Ito, N.⁴ Ohshio, S.⁵ Ito, H.⁶

5
- 0033742983
- H. Ito, N. Ito, T. Takahashi, H. Takamatsu, D. Tanaka, S. Ohshio and H. Saitoh: Jpn. J. Appl. Phys. 39 (2000) 1371.
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 1371
- Ito, H.¹ Ito, N.² Takahashi, T.³ Takamatsu, H.⁴ Tanaka, D.⁵ Ohshio, S.⁶ Saitoh, H.⁷

6
- 0000879286
- P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga and W. I. Milne: Phys. Rev. B 48 (1993) 4777.
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶

7
- 36449001720
- K. Kamata, T. Inoue, K. Sugai, H. Saitoh and K. Maruyama: J. Appl. Phys. 78 (1995) 1394.
- (1995) J. Appl. Phys. , vol.78 , pp. 1394
- Kamata, K.¹ Inoue, T.² Sugai, K.³ Saitoh, H.⁴ Maruyama, K.⁵

8
- 0001710134
- W. D. Nix: Metall. Trans. A 20 (1988) 1989.
- (1988) Metall. Trans. A , vol.20 , pp. 1989
- Nix, W.D.¹

9
- 0030286844
- D. Tanaka, S. Ohshio and H. Saitoh: Jpn. J. Appl. Phys. 35 (1996) L1452.
- (1996) Jpn. J. Appl. Phys. , vol.35
- Tanaka, D.¹ Ohshio, S.² Saitoh, H.³

10
- 84986407388
- N. M. Keulen: J. Am. Ceram. Soc. 76 (1993) 904.
- (1993) J. Am. Ceram. Soc. , vol.76 , pp. 904
- Keulen, N.M.¹

11
- 0031248629
- A. V. Kulkarni and B. Bhushan: J. Mater. Res. 12 (1997) 2707.
- (1997) J. Mater. Res. , vol.12 , pp. 2707
- Kulkarni, A.V.¹ Bhushan, B.²

12
- 0032399431
- P. Hammer, N. M. Victoria and F. Alvarez: J. Vac. Sci. & Technol. A 16 (1998) 2941.
- (1998) J. Vac. Sci. & Technol. A , vol.16 , pp. 2941
- Hammer, P.¹ Victoria, N.M.² Alvarez, F.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.