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Chemistry of Materials

Volumn 13, Issue 3, 2001, Pages 817-823

In situ mass spectrometry study on atomic layer deposition from metal (Ti, Ta, and Nb) ethoxides and water

(3) Rahtu, A a Kukli, K a,b Ritala, M a

a UNIVERSITY OF HELSINKI (Finland)

b UNIVERSITY OF TARTU (Estonia)

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM OXIDE; METAL OXIDE; NIOBIUM; TANTALUM; TITANIUM DIOXIDE;

ADSORPTION; ARTICLE; DECOMPOSITION; MASS SPECTROMETRY; REACTION ANALYSIS; TEMPERATURE DEPENDENCE; X RAY DIFFRACTION;

EID: 0034839628 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm0011110 Document Type: Article

Times cited : (61)

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