Composition, chemical bonding and mechanical properties of magnetron sputtered CNx thin films at different substrate bias

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 53-56

  Gioti, M ^a   Logothetidis, S ^a   Charitidis, C ^a   Lefakis, H ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL BONDS; COMPOSITION; ELASTICITY; ELECTRIC POTENTIAL; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; NITROGEN; OPTICAL PROPERTIES; STRESSES;

BIAS VOLTAGE; CARBON NITRIDE FILMS;

THIN FILMS;

EID: 0033131683     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00421-7     Document Type: Article

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