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Volumn 36, Issue 5-6, 1998, Pages 757-760

Carbon nitride thin films prepared by reactive r.f. magnetron sputtering

Author keywords

A. Carbon composites; B. plasma sputtering; C. infrared spectroscopy; D. optical properties

Indexed keywords


EID: 0001416326     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00073-6     Document Type: Article
Times cited : (14)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.