Optical properties and new carbon forms of sputtered amorphous carbon films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 446-450

  Gioti, M ^a   Logothetidis, S ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Amorphous carbon; Ellipsometry; Modeling; Sputtering

Indexed keywords

CARBON; CHEMICAL BONDS; DIELECTRIC FILMS; ELECTRIC POTENTIAL; ELECTRONIC STRUCTURE; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICON; SPUTTER DEPOSITION; SUBSTRATES;

BRUGGEMAN EFFECTIVE MEDIUM THEORY;

AMORPHOUS FILMS;

EID: 0032621808     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00361-6     Document Type: Article

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