Binding state transformation in high temperature synthesized CN thin films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 614-617

  Yap, Y K ^a   Kida, S ^a   Aoyama, T ^a   Mori, Y ^a   Sasaki, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Annealing; CN films; Ion assisted deposition; Sp2 Bonding; Sp3 Bonding; Stress; Thermal stability

Indexed keywords

CHEMICAL BONDS; DEPOSITION; NITRIDES; PULSED LASER APPLICATIONS; STRESS ANALYSIS; THERMODYNAMIC STABILITY;

CARBON NITRIDE; ION ASSISTED-DEPOSITION;

AMORPHOUS FILMS;

EID: 0032608061     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00338-0     Document Type: Article

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