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Volumn 45, Issue 8, 2001, Pages 1361-1369
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A recombination- and trap-assisted tunneling model for stress-induced leakage current
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Author keywords
MOS devices; SILC; Trap assisted tunneling; Ultrathin oxides
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Indexed keywords
DATA STORAGE EQUIPMENT;
ELECTRON TRAPS;
ELECTRON TUNNELING;
HOLE TRAPS;
LEAKAGE CURRENTS;
SILICA;
ULTRATHIN FILMS;
STRESS INDUCED LEAKAGE CURRENTS (SILC);
TRAP-ASSISTED TUNNELING MODELS;
MOS DEVICES;
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EID: 0035417256
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(01)00173-3 Document Type: Article |
Times cited : (12)
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References (42)
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