Reliability projection for ultra-thin oxides at low voltage

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 167-170

  Stathis, J H ^a   DiMaria, D J ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRIC BREAKDOWN OF SOLIDS; MOSFET DEVICES; RELIABILITY; SEMICONDUCTING SILICON COMPOUNDS; SILICA;

ELECTRICAL STRESSES;

GATES (TRANSISTOR);

EID: 0032275853     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)