Morphological study of kinetic roughening on amorphous and microcrystalline silicon surface

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 890-895

  Kondo, M ^a   Ohe, T ^a   Saito, K ^a   Nishimiya, T ^a   Matsuda, A ^a  

^a Thin Film Silicon Solar Cells S   (Japan)

Author keywords

a Si:H; Surface morphology; c Si:H

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; HYDROGEN; MORPHOLOGY; REACTION KINETICS; SEMICONDUCTOR GROWTH; SUBSTRATES; SURFACE ROUGHNESS;

MICROCRYSTALLINE SILICON;

SEMICONDUCTING SILICON;

EID: 0032067892     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00274-9     Document Type: Article

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