SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 609, Issue , 2000, Pages

Surface microchemical reactions during hydrogenated silicon growth studied by in-situ ESR technique

(1) Yamasaki, S a

a NATL INST FOR ADV INTERDISC RES (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGENATION; MATHEMATICAL MODELS; PARAMAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; SEMICONDUCTING FILMS; SEMICONDUCTOR GROWTH; SURFACE REACTIONS; ULTRAHIGH VACUUM;

DANGLING BONDS; SURFACE MICROCHEMICAL REACTIONS;

AMORPHOUS SILICON;

EID: 0034431172 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-609-a1.1 Document Type: Conference Paper

Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.