Strain in epitaxial laterally overgrown (ELO) structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4413, Issue , 2001, Pages 112-119

  Zytkiewicz, Z R ^a  

^a INSTITUTE OF PHYSICS   (Poland)

Author keywords

Epitaxial lateral overgrowth; Lattice mismatched epitaxial structures; Liquid phase epitaxy

Indexed keywords

LIQUID PHASE EPITAXY; MASKS; SEMICONDUCTING SILICON; STRAIN; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EPITAXIAL LATERAL OVERGROWN (ELO) STRUCTURES;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0034934040     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425413     Document Type: Conference Paper

References (31)

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