메뉴 건너뛰기




Volumn E82-C, Issue 6, 1999, Pages 830-838

Mechanical stress simulation for highly reliable deep-submicron devices

Author keywords

Residual stress; Semiconductor; Stress analysis; Stress measurement; Transistor

Indexed keywords

COMPUTER SIMULATION; ELECTRONIC PROPERTIES; GATES (TRANSISTOR); MECHANICAL VARIABLES MEASUREMENT; MOSFET DEVICES; RESIDUAL STRESSES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; STRESS ANALYSIS; THIN FILMS;

EID: 0033312325     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (21)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.