Development of SIMUS 2D/F: A Stress Analysis Program for Thin Multilayer Structure

Transactions of the Japan Society of Mechanical Engineers Series A

Volumn 55, Issue 515, 1989, Pages 1652-1656

  Saito, Naoto ^a   Sakata, Shinji ^a   Shimizu, Tasuku ^a   Isomae, Seiichi ^a   Masuda, Hiroo ^a  

^a NONE

Author keywords

Finite Element Method; LSI; Semiconductor; Stress Analysis; Viscoelastic Analysis

Indexed keywords

MATHEMATICAL TECHNIQUES--FINITE ELEMENT METHOD;

SOFTWARE PACKAGE SIMUS 2D/F; THIN MULTILAYER STRUCTURE; VISCOELASTIC ANALYSIS;

STRESSES;

EID: 0024701845     PISSN: 03875008     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaia.55.1652     Document Type: Article

References (3)

1. 131, (1983), 330.
2. 1, 52–477, A (1986), 148.
3. 2, 53–495, A(1987), 2187.