Stress-related problems in silicon technology

Journal of Applied Physics

Volumn 70, Issue 6, 1991, Pages

  Hu, S M ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33745905893     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.349282     Document Type: Article

References (0)