Investigation of optical anisotropy of refractive-index-profiled porous silicon employing generalized ellipsometry

Journal of Materials Research

Volumn 14, Issue 11, 1999, Pages 4167-4175

  Zangooie, S ^a   Jansson, R ^a   Arwin, H ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; APPROXIMATION THEORY; BIREFRINGENCE; CRYSTALLINE MATERIALS; CURRENT DENSITY; ELLIPSOMETRY; ETCHING; REFRACTIVE INDEX; SURFACE ROUGHNESS;

BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; OPTICAL ANISOTROPY;

POROUS SILICON;

EID: 0033221881     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0564     Document Type: Article

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