Macroporous p-type silicon Fabry-Perot layers. Fabrication, characterization, and applications in biosensing

Journal of the American Chemical Society

Volumn 120, Issue 46, 1998, Pages 12108-12116

  Janshoff, Andreas ^a   Dancil, Keiki Pua S ^a   Steinem, Claudia ^a   Greiner, Douglas P ^a   Lin, Victor S Y ^a   Gurtner, Christian ^a   Motesharei, Kianoush ^a   Sailor, Michael J ^a   Reza Ghadiri, M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ARTICLE; BIOSENSOR; MOLECULAR INTERACTION; POROSITY; SCANNING ELECTRON MICROSCOPY; SCANNING FORCE MICROSCOPY; TRANSDUCER;

EID: 0032567213     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja9826237     Document Type: Article

References (5)

1. (a) Ulhir, A. Bell Syst. Tech. J. 1956, 35, 333.
2. (b) Turner, T. R. J. Electrochem. Soc. 1958, 105, 402.
3. Canham, P. C. Appl. Phys. Lett. 1990, 57, 1046.
4. Berger, M. G.; Arens-Fischer, R.; Thönissen, M.; Krüger, M.; Billat, S.; Lüth, H.; Hilbrich, S.; Theiss, W.; Grosse, P. Thin Solid Films 1997, 297, 237.
5. (e) Cullis, A. G.; Canham, L. T.; Calcott, P. D. J. J. Appl. Phys. 1997, 82, 909.