Vapor sensitivity of thin porous silicon layers

Sensors and Actuators, B: Chemical

Volumn 43, Issue 1-3, 1997, Pages 168-174

  Zangooie, Shahin ^a   Bjorklund, Robert ^a   Arwin, Hans ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Optical sensors; Porous silicon layers; Spectroscopic ellipsometry; Vapour sensitivity

Indexed keywords

ACETONE; CONDENSATION; ELLIPSOMETRY; MATHEMATICAL MODELS; POROUS SILICON; REFRACTIVE INDEX; SENSITIVITY ANALYSIS; VAPORS;

CAPILLARY CONDENSATION; POROUS SILICON LAYERS; SPECTROSCOPIC ELLIPSOMETRY; VAPOUR SENSITIVITY;

OPTICAL SENSORS;

EID: 0031221017     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00148-2     Document Type: Article

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