SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 22-25

Influence of etch stops on the micro structure of porous silicon layers

(6) Billat, S a Thonissen M a Arens Fischer, R a Berger, M G a Kruger M a Luth H a

a FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

PL; Porosity gradient; Porous silicon; Raman

Indexed keywords

ELECTROLYTES; ETCHING; MECHANICAL PROPERTIES; MICROSTRUCTURE; OPTICAL FILTERS; PHOTOLUMINESCENCE; POROSITY; POROUS SILICON; RAMAN SPECTROSCOPY; STABILITY;

INTERFERENCE FILTERS; POROSITY GRADIENT;

THIN FILMS;

EID: 0031117590 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09421-7 Document Type: Article

Times cited : (96)

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