Analysis of the depth homogeneity of p-PS by reflectance measurements

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 92-96

  Thonissen M ^a   Berger, M G ^a   Billat, S ^a   Arens Fischer, R ^a   Kruger M ^a   Luth H ^a   Theiss W ^b   Hillbrich, S ^b   Grosse, P ^b   Lerondel, G ^c   Frotscher, U ^d  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c UNIV GRENOBLE ALPES   (France)

^d TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Optical spectroscopy; Reflection spectroscopy; Silicon

Indexed keywords

CHEMICAL MODIFICATION; COMPOSITION; ELECTROLYTES; ETCHING; POROSITY; REFLECTOMETERS; SPECTROSCOPY;

EFFECTIVE MEDIUM THEORY; OPTICAL SPECTROSCOPY; REFLECTION SPECTROSCOPY;

POROUS SILICON;

EID: 0031120259     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09420-5     Document Type: Article

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