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Applied Surface Science

Volumn 136, Issue 1-2, 1998, Pages 123-130

Microstructural control of porous silicon by electrochemical etching in mixed HCl/HF solutions

(3) Zangooie, S a Jansson, R a Arwin, H a

a LINKÖPING UNIVERSITY (Sweden)

Author keywords

Hydrochloric acid; Microstructural control; Porous silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROCHEMISTRY; ELLIPSOMETRY; ETCHING; HYDROCHLORIC ACID; HYDROFLUORIC ACID; MICROSTRUCTURE; MORPHOLOGY; PORE SIZE; POROSITY; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS;

POWER SPECTRAL DENSITY; SPECTROSCOPIC ELLIPSOMETRY;

POROUS SILICON;

EID: 0032179265 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00328-6 Document Type: Article

Times cited : (29)

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