Dielectric filters made of PS: Advanced performance by oxidation and new layer structures

Thin Solid Films

Volumn 297, Issue 1-2, 1997, Pages 237-240

  Berger, M G ^a   Arens Fischer, R ^a   Thonissen M ^a   Kruger M ^a   Billat, S ^a   Luth H ^a   Hilbrich, S ^b   Theiss W ^b   Grosse, P ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Oxidation; PS layers; Thermal oxidation

Indexed keywords

CALIBRATION; CURRENT DENSITY; DIELECTRIC PROPERTIES; ELECTRIC FILTERS; OXIDATION; PERFORMANCE; POROSITY; POROUS SILICON; REFRACTIVE INDEX; SPECTROSCOPY; THERMOOXIDATION;

DIELECTRIC FILTERS; DIELECTRIC FUNCTIONS; RUGATE FILTERS;

MULTILAYERS;

EID: 0031118814     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09361-3     Document Type: Article

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