High temperature oxidation of (Ti1-xAlx)N coatings made by plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 133-137

  Kim, Byoung June ^a   Kim, Young Cheol ^b   Nah, Jae Woong ^a   Lee, Jung Joong ^a  

^a Seoul National University   (South Korea)

^b Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033480185     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581562     Document Type: Article

References (21)

1. W. D. Münz, J. Vac. Sci. Technol. A 4, 2695 (1986).
2. O. Knotek, W. D. Münz, and T. Leyendecker, J. Vac. Sci. Technol. A 5, 2173 (1987).
3. J. R. Roos, J. P. Celis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. Ebberink, and H. Homberg, Thin Solid Films 193/194, 547 (1990).
4. H. Randhawa, P. C. Johnson, and R. Cunningham, J. Vac. Sci. Technol. A 6, 2136 (1988).
5. H. Ichmura and A. Kawana, J. Mater. Res. 8, 1093 (1993).
6. D. McIntyre, J. E. Greene, G. Hakansson, J. E. Sundgren, and W. D. Münz, J. Appl. Phys. 67, 1524 (1990).
7. T. Ikeda and H. Satoh, Thin Solid Films 195, 99 (1991).
8. C. W. Louw, I. L. Strydom, K. Heever, and M. J. Staden, Surf. Coat. Technol. 49, 348 (1991).
9. S. H. Lee, H. J. Ryoo, and J. J. Lee, J. Vac. Sci. Technol. A 12, 1602 (1994).
10. S. H. Lee and J. J. Lee, J. Vac. Sci. Technol. A 13, 2030 (1995).
11. S. H. Lee, B. J. Kim, H. H. Kim, and J. J. Lee, J. Appl. Phys. 80, 1469 (1996).
12. B. J. Kim, S. H. Lee, and J. J. Lee, J. Mater. Sci. Lett. 16, 1597 (1997).
13. A. von Richthofen, R. Cremer, M. Witthaut, R. Domnick, and D. Neuschütz, Thin Solid Films 312, 190 (1998).
14. Handbook of X-ray Photoelectron Spectroscopy, edited by J. Chastain (Perkin-Elmer, Eden Prairie, MN, 1992), pp. 213-242.
15. Binary Alloy Phase Diagrams, 2nd ed., edited by T. B. Massalaki et al. (APDIC, 1985), Vol. 1, pp. 185-186.
16. M. Hoch and H. L. Johnston, J. Am. Chem. Soc. 76, 2560 (1954).
17. H. Yanagida and F. A. Kroger, J. Am. Ceram. Soc. 51, 700 (1968).
18. M. Wittmer, J. Noser, and H. Melchior, J. Appl. Phys. 52, 6659 (1981).
19. A. Tampieri, E. Landi, and A. Bellosi, Br. Ceram. Trans. J. 90, 194 (1991).
20. A. Joshi and H. S. Hu, Surf. Coat. Technol. 76/77, 499 (1995).
21. Y. G. Gogotsi, F. Porz, and G. Dransfiedl, Oxid. Met. 39, 69 (1993).