The influence of a heat treatment on the microstructure and mechanical properties of sputtered coatings

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 335-340

  Herr, W ^a   Broszeit, E ^b  

^a Department of Mechanics   (Germany)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Adhesion; Auger electron spectroscopy; Borides; Heat treatment; Intrinsic stress; Microhardness; Microstructure; Nitrides; PVD; Sputtering

Indexed keywords

ADHESION; AUGER ELECTRON SPECTROSCOPY; BORIDES; HARDNESS TESTING; HEAT TREATMENT; NITRIDES; PHASE COMPOSITION; RESIDUAL STRESSES; SPUTTER DEPOSITION; STRESS ANALYSIS; SUBSTRATES; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION (PVD);

PROTECTIVE COATINGS;

EID: 0031345414     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00196-5     Document Type: Article

References (8)

1. W. Herr, E. Broszeit, Effect of an annealing process on the tribological properties of sputtered hard coatings, Proc. 5th Int. Conf. on Plasma Surface Engineering, 9-13 Sept. 1996, in: Surf. Coat. Technol. (1997).
2. W. Herr, E. Broszeit, Effect of an annealing process on the tribological properties of sputtered hard coatings, Proc. 5th Int. Conf. on Plasma Surface Engineering, 9-13 Sept. 1996, in: Surf. Coat. Technol. (1997).
3. H.M. Pollock, D. Maugis, M. Barquins, in: ASTM STP 889, American Society for Testing and Materials, Philadelphia, 1986, p. 47.
4. R. Lohmann, E. Osterschulze, K. Thoma, H. Gartner, W. Herr, B. Matthes, E. Broszeit, K.H. Kloos, Mater. Sci. Eng. 139 (1991) 259-263.
5. E. Nold, C. Adelhelm, H. Holleck, Mat.-wiss. u. Werkstofftechnik 21 (1990) 137.
6. W. Herr, B. Matthes, E. Broszeit, M. Meyer, R. Suchentrunk, Surf. Coat. Technol. 60 (1993) 428-433.
7. E.O. Hall, Yield Point Phenomena in Metals and Alloys, MacMillan, 1970.
8. W. Herr, Röntgenographische Untersuchungen über die thermische Stabilitat von Struktur und Eigenspannungen gesputterter PVD-Schichten und deren Einfluße auf die mechanischen und tribologischen Eigenschaften, Dissertation D17, TH Darmstadt, 1996.