Thermal annealing, irradiation, and stress in multilayers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 227-231

  Fayeulle, S ^a,b   Misra, A ^a   Kung, H ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b ECOLE CENTRALE DE LYON   (France)

Author keywords

Irradiation; Multilayers; Stress; Thermal annealing

Indexed keywords

ANNEALING; BORON COMPOUNDS; COMPRESSIVE STRESS; CRYSTAL MICROSTRUCTURE; DIFFUSION IN SOLIDS; INTERFACES (MATERIALS); ION BOMBARDMENT; PHASE SEPARATION; STRESS RELAXATION; TENSILE STRESS; THIN FILMS; TITANIUM NITRIDE;

BILAYER REPEAT LENGTH;

MULTILAYERS;

EID: 0033513807     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00774-5     Document Type: Article

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