Microstructure and electronic properties of the refractory semiconductor ScN grown on MgO(001) by ultra-high-vacuum reactive magnetron sputter deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2411-2417

  Gall, D ^a   Petrov, I ^a   Madsen, L D ^a,b   Sundgren, J E ^b   Greene, J E ^a,b  

^a University of Illinois at Urbana Champaign   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032349151     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581360     Document Type: Article

References (23)

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