Fabrication of integrated diamond cantilevers with tips for SPM applications

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 906-911

  Kulisch, W ^a   Malave, A ^a   Lippold, G ^b   Scholz, W ^a   Mihalcea, C ^a   Oesterschulze, E ^a  

^a UNIVERSITY OF KASSEL   (Germany)

^b UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

High resonance frequencies; Hot filament CVD diamond deposition; Integrated diamond cantilevers; SPM applications

Indexed keywords

EID: 0001567218     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00600-0     Document Type: Article

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